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Laser-vibrometric ultrasonic characterization of resonant modes and quality factors of Ge membranes
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Trushkevych, Oksana, Shah, V. A., Myronov, Maksym, Halpin, John E., Rhead, S., Prest, M. J. (Martin J.), Leadley, D. R. (David R.) and Edwards, R. S. (Rachel Sian) (2014) Laser-vibrometric ultrasonic characterization of resonant modes and quality factors of Ge membranes. Science and Technology of Advanced Materials, Volume 15 (Number 2). Article number 025004. doi:10.1088/1468-6996/15/2/025004 ISSN 1468-6996.
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Official URL: http://dx.doi.org/10.1088/1468-6996/15/2/025004
Abstract
The vibrations of a single-crystal germanium (Ge) membrane are studied in air and vacuum using laser vibrometry, in order to determine mechanical properties such as Q-factors, tensile stress, anisotropy, and robustness to shock. Resonance modes up to 3:2 are identified, giving a residual stress measurement of 0.22 GPa, consistent with the value obtained from x-ray relaxation studies. The membrane is found to be isotropic, with Q-factors ranging from around 40 at atmospheric pressure to over 3200 at 5 x 10-4 mbar, significantly lower than those found in polycrystalline Ge micromechanical devices. The robustness to shock is explained through the high resonance mode frequencies and the dissipation mechanism into the substrate, which is a direct consequence of having a high quality film with low residual tensile stress, giving the potential for such films to be used in optoelectronic devices.
Item Type: | Journal Article | ||||||||
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Subjects: | Q Science > QC Physics | ||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||||
Library of Congress Subject Headings (LCSH): | Germanium, Laser interferometry | ||||||||
Journal or Publication Title: | Science and Technology of Advanced Materials | ||||||||
Publisher: | Institute of Physics Publishing Ltd. | ||||||||
ISSN: | 1468-6996 | ||||||||
Official Date: | 7 April 2014 | ||||||||
Dates: |
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Volume: | Volume 15 | ||||||||
Number: | Number 2 | ||||||||
Number of Pages: | 13 | ||||||||
Article Number: | Article number 025004 | ||||||||
DOI: | 10.1088/1468-6996/15/2/025004 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Open Access (Creative Commons) | ||||||||
Date of first compliant deposit: | 27 December 2015 | ||||||||
Date of first compliant Open Access: | 27 December 2015 | ||||||||
Funder: | European Research Council (ERC), Engineering and Physical Sciences Research Council (EPSRC), European Commission (EC) | ||||||||
Grant number: | 202735 (ERC), EP/F040784/1 (EPSRC), EP/J001074/1 (EPSRC), 257375 (EC) |
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