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Microscopy of Semiconducting Materials : 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK
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Cullis, A. G. and Beanland, R., eds. (2000) Microscopy of Semiconducting Materials : 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK. Institute of Physics Conference Series . Oxford : CRC Press. ISBN 9780750306508
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Official URL: http://www.crcpress.com/product/isbn/9780750306508
Abstract
With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy techniques using different types of scanning probes, such as AFM, STM, and SCM. In addition, the book discusses a range of materials, from finished devices to partly processed materials and structures, including nanoscale wires and dots.
This volume provides an authoritative reference for all academics and researchers in materials science, electrical and electronic engineering and instrumentation, and condensed matter physics.
| Item Type: | Book | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Series Name: | Institute of Physics Conference Series | ||||
| Publisher: | CRC Press | ||||
| Place of Publication: | Oxford | ||||
| ISBN: | 9780750306508 | ||||
| Editor: | Cullis, A. G. and Beanland, R. | ||||
| Official Date: | 1 January 2000 | ||||
| Dates: |
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| Number of Pages: | 774 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published |
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