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Design rules for dislocation filters
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Ward, Thomas, Sánchez, Ana M., Tang, Mingchu, Wu, Jiang, Liu, Huiyun, Dunstan, David J. and Beanland, R. (2014) Design rules for dislocation filters. Journal of Applied Physics, Volume 116 (Number 6). 063508. doi:10.1063/1.4892162
An open access version can be found in:
Official URL: http://dx.doi.org/10.1063/1.4892162
Abstract
The efficacy of strained layer threading dislocation filter structures in single crystal epitaxial layers is evaluated using numerical modeling for (001) face-centred cubic materials, such as GaAs or Si1− x Ge x , and (0001) hexagonal materials such as GaN. We find that threading dislocation densities decay exponentially as a function of the strain relieved, irrespective of the fraction of threading dislocations that are mobile. Reactions between threading dislocations tend to produce a population that is a balanced mixture of mobile and sessile in (001) cubic materials. In contrast, mobile threading dislocations tend to be lost very rapidly in (0001) GaN, often with little or no reduction in the immobile dislocation density. The capture radius for threading dislocation interactions is estimated to be approximately 40 nm using cross section transmission electron microscopy of dislocation filtering structures in GaAs monolithically grown on Si. We find that the minimum threading dislocation density that can be obtained in any given structure is likely to be limited by kinetic effects to approximately 104–105 cm−2.
| Item Type: | Journal Article | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Divisions: | Faculty of Science > Physics | ||||||||
| Journal or Publication Title: | Journal of Applied Physics | ||||||||
| Publisher: | American Institute of Physics | ||||||||
| ISSN: | 0021-8979 | ||||||||
| Official Date: | 14 August 2014 | ||||||||
| Dates: |
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| Volume: | Volume 116 | ||||||||
| Number: | Number 6 | ||||||||
| Article Number: | 063508 | ||||||||
| DOI: | 10.1063/1.4892162 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC) | ||||||||
| Grant number: | EP/J013048/1 (EPSRC), EP/J012904/1 (EPSRC) | ||||||||
| Open Access Version: |
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