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Tensile strained Ge membranes
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Shah, V. A., Trushkevych, Oksana, Myronov, Maksym, Rhead, Stephen, Halpin, John E., Edwards, R. S. (Rachel Sian) and Leadley, D. R. (David R.) (2014) Tensile strained Ge membranes. In: 15th International Conference on Ultimate Integration on Silicon (ULIS), 2014 , Stockholm, Sweden, 7-9 April 2014. Published in: International Conference on Ultimate Integration on Silicon pp. 137-140. ISSN 2330-5738. doi:10.1109/ULIS.2014.6813917
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Official URL: http://dx.doi.org/10.1109/ULIS.2014.6813917
Abstract
Germanium membranes of 50-1000 nm thickness have been fabricated by a combination of epitaxial growth on a Si substrate and simple etching processes. The biaxial tensile strain in these membranes has been measured by high-resolution X-ray diffraction and by ultrasonic vibrational spectroscopy. The later technique also shows that membranes have a Q-factor of ~3000 at low temperature. The stain in these membranes is extremely isotropic and the surface is observed to be very smooth, with an rms roughness of below 2 nm. The process of membrane fabrication also serves to remove the misfit dislocation network that originally forms at the Si/Ge interface, with benefits for the mechanical, optical and electrical properties of the crystalline membranes.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science > Physics | ||||
| Journal or Publication Title: | International Conference on Ultimate Integration on Silicon | ||||
| Publisher: | IEEE Computer Society | ||||
| ISSN: | 2330-5738 | ||||
| Book Title: | 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) | ||||
| Official Date: | 2014 | ||||
| Dates: |
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| Page Range: | pp. 137-140 | ||||
| DOI: | 10.1109/ULIS.2014.6813917 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 15th International Conference on Ultimate Integration on Silicon (ULIS), 2014 | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Stockholm, Sweden | ||||
| Date(s) of Event: | 7-9 April 2014 |
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