The Library
Tensile strained Ge membranes
Tools
Shah, V. A., Trushkevych, Oksana, Myronov, Maksym, Rhead, Stephen, Halpin, John E., Edwards, R. S. (Rachel Sian) and Leadley, D. R. (David R.) (2014) Tensile strained Ge membranes. In: 15th International Conference on Ultimate Integration on Silicon (ULIS), 2014 , Stockholm, Sweden, 7-9 April 2014. Published in: International Conference on Ultimate Integration on Silicon pp. 137-140. doi:10.1109/ULIS.2014.6813917 ISSN 2330-5738.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1109/ULIS.2014.6813917
Abstract
Germanium membranes of 50-1000 nm thickness have been fabricated by a combination of epitaxial growth on a Si substrate and simple etching processes. The biaxial tensile strain in these membranes has been measured by high-resolution X-ray diffraction and by ultrasonic vibrational spectroscopy. The later technique also shows that membranes have a Q-factor of ~3000 at low temperature. The stain in these membranes is extremely isotropic and the surface is observed to be very smooth, with an rms roughness of below 2 nm. The process of membrane fabrication also serves to remove the misfit dislocation network that originally forms at the Si/Ge interface, with benefits for the mechanical, optical and electrical properties of the crystalline membranes.
Item Type: | Conference Item (Paper) | ||||
---|---|---|---|---|---|
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | International Conference on Ultimate Integration on Silicon | ||||
Publisher: | IEEE Computer Society | ||||
ISSN: | 2330-5738 | ||||
Book Title: | 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) | ||||
Official Date: | 2014 | ||||
Dates: |
|
||||
Page Range: | pp. 137-140 | ||||
DOI: | 10.1109/ULIS.2014.6813917 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 15th International Conference on Ultimate Integration on Silicon (ULIS), 2014 | ||||
Type of Event: | Conference | ||||
Location of Event: | Stockholm, Sweden | ||||
Date(s) of Event: | 7-9 April 2014 |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |