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Ambient temperature carbon nanotube ammonia sensor on CMOS platform
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Santra, Sumita, Sinha, A. K., Ray, S. K., Ali, Syed Z., Udrea, Florin, Gardner, J. W. and Guha, Prasanta K. (2014) Ambient temperature carbon nanotube ammonia sensor on CMOS platform. Procedia Engineering, Volume 87 . pp. 224-227. doi:10.1016/j.proeng.2014.11.627 ISSN 1877-7058.
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Official URL: http://dx.doi.org/10.1016/j.proeng.2014.11.627
Abstract
We report here the development of a resistive single wall carbon nanotubes (SWCNTs) sensor, based on a CMOS substrate that responds at ambient temperature to ppm levels of ammonia. The power efficient CMOS micro-hotplate is a thin membrane structure and comprises metal heater with an interdigitated electrode. The SWCNTs film was prepared first by treatment with aqua regia solution, followed by washing with distilled water, and then treated with ascorbic acid at 95°C. The film was deposited by simply dipping the chip into the solution. The SWCNTs showed good response to ammonia in a humid nitrogen atmosphere.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology > TP Chemical technology |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Library of Congress Subject Headings (LCSH): | Gas detectors, Carbon nanotubes, Metal oxide semiconductors, Complementary, Ammonia | ||||
Journal or Publication Title: | Procedia Engineering | ||||
Publisher: | Elsevier | ||||
ISSN: | 1877-7058 | ||||
Official Date: | 31 December 2014 | ||||
Dates: |
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Volume: | Volume 87 | ||||
Page Range: | pp. 224-227 | ||||
DOI: | 10.1016/j.proeng.2014.11.627 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Open Access (Creative Commons) | ||||
Date of first compliant deposit: | 28 December 2015 | ||||
Date of first compliant Open Access: | 28 December 2015 | ||||
Funder: | India. Department of Science and Technology (DST), Indian Institute of Technology (Kharagpur, India) | ||||
Grant number: | SR/S2/RJN-104/2011 (DST) | ||||
Title of Event: | EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers | ||||
Location of Event: | Brecia, Italy | ||||
Date(s) of Event: | 7-10 Sep 2014 |
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