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SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating

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De Luca, A., Cole, Matthew T., Hopper, R. H., Ali, Syed Z., Udrea, Florin, Gardner, J. W. and Milne, W. I. (2014) SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating. Procedia Engineering, Volume 87 . pp. 839-842. doi:10.1016/j.proeng.2014.11.284 ISSN 1877-7058.

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Official URL: http://dx.doi.org/10.1016/j.proeng.2014.11.284

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Abstract

This abstract presents the development of a Silicon-on-Insulator (SOI) CMOS micro-electro-mechanical (MEMS) micro-hotplate based infra-red (IR) light source employing a vertically aligned multi-walled carbon nanotubes (VA- MWCNTs) emission layer. Chips were batch fabricated using a standard SOI CMOS process with tungsten metalization followed by a deep reactive ion etching (DRIE) post-CMOS process. VA-MWCNTs were grown at the chip level with a proven in-situ technique. The CNTs coated devices were compared with uncoated devices. Herein we discuss the device performance in terms of power dissipation, beam collimation, thermal transient times, integrated emitted radiation and emitted radiation spectral profile.

Item Type: Journal Article
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Carbon nanotubes, Silicon-on-insulator technology
Journal or Publication Title: Procedia Engineering
Publisher: Elsevier
ISSN: 1877-7058
Official Date: 31 December 2014
Dates:
DateEvent
31 December 2014Published
Volume: Volume 87
Page Range: pp. 839-842
DOI: 10.1016/j.proeng.2014.11.284
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Open Access (Creative Commons)
Date of first compliant deposit: 28 December 2015
Date of first compliant Open Access: 28 December 2015
Funder: Seventh Framework Programme (European Commission) (FP7)
Grant number: 288481 (FP7)
Title of Event: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
Location of Event: Brecia, Italy
Date(s) of Event: 7-10 Sep 2014

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