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SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating
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De Luca, A., Cole, Matthew T., Hopper, R. H., Ali, Syed Z., Udrea, Florin, Gardner, J. W. and Milne, W. I. (2014) SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating. Procedia Engineering, Volume 87 . pp. 839-842. doi:10.1016/j.proeng.2014.11.284
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Official URL: http://dx.doi.org/10.1016/j.proeng.2014.11.284
Abstract
This abstract presents the development of a Silicon-on-Insulator (SOI) CMOS micro-electro-mechanical (MEMS) micro-hotplate based infra-red (IR) light source employing a vertically aligned multi-walled carbon nanotubes (VA- MWCNTs) emission layer. Chips were batch fabricated using a standard SOI CMOS process with tungsten metalization followed by a deep reactive ion etching (DRIE) post-CMOS process. VA-MWCNTs were grown at the chip level with a proven in-situ technique. The CNTs coated devices were compared with uncoated devices. Herein we discuss the device performance in terms of power dissipation, beam collimation, thermal transient times, integrated emitted radiation and emitted radiation spectral profile.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
| Divisions: | Faculty of Science > Engineering | ||||
| Library of Congress Subject Headings (LCSH): | Carbon nanotubes, Silicon-on-insulator technology | ||||
| Journal or Publication Title: | Procedia Engineering | ||||
| Publisher: | Elsevier | ||||
| ISSN: | 1877-7058 | ||||
| Official Date: | 31 December 2014 | ||||
| Dates: |
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| Date of first compliant deposit: | 28 December 2015 | ||||
| Volume: | Volume 87 | ||||
| Page Range: | pp. 839-842 | ||||
| DOI: | 10.1016/j.proeng.2014.11.284 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Open Access | ||||
| Funder: | Seventh Framework Programme (European Commission) (FP7) | ||||
| Grant number: | 288481 (FP7) | ||||
| Title of Event: | EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers | ||||
| Location of Event: | Brecia, Italy | ||||
| Date(s) of Event: | 7-10 Sep 2014 |
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