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A CMOS-MEMS thermopile with an integrated temperature sensing diode for mid-IR thermometry
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Hopper, R. H., Ali, Syed Z., Chowdhury, M. F., Boual, S., De Luca, A., Gardner, J. W. and Udrea, Florin (2014) A CMOS-MEMS thermopile with an integrated temperature sensing diode for mid-IR thermometry. Procedia Engineering, Volume 87 . pp. 1127-1130. doi:10.1016/j.proeng.2014.11.363 ISSN 1877-7058.
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Official URL: http://dx.doi.org/10.1016/j.proeng.2014.11.363
Abstract
In this paper, we describe an infrared thermopile sensor comprising of single crystal silicon p+ and n+ elements, with an integrated diode temperature sensor fabricated using a commercial SOI-CMOS process followed by Deep Reactive Ion Etching (DRIE). The chip area is 1.16 mm × 1.06 mm. The integrated diode, being on the same substrate, allows a more localized measurement of the cold junction temperature compared to a conventional external thermistor. The use of single crystal silicon allows good process control and reproducibility from device-to-device in terms of both Seebeck coefficient and sensor resistance. The device has a measured responsivity of 23 V/W, detectivity of 0.75 × 108 cm√Hz/W, a 50% modulation depth of 60 Hz and shows enhanced responsivity in the 8 – 14 μm wavelength range, making it particularly suitable for thermometry applications.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Library of Congress Subject Headings (LCSH): | Thermopiles, Infrared detectors, Metal oxide semiconductors, Complementary, Thermometers | ||||
Journal or Publication Title: | Procedia Engineering | ||||
Publisher: | Elsevier | ||||
ISSN: | 1877-7058 | ||||
Official Date: | 31 December 2014 | ||||
Dates: |
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Volume: | Volume 87 | ||||
Page Range: | pp. 1127-1130 | ||||
DOI: | 10.1016/j.proeng.2014.11.363 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Open Access (Creative Commons) | ||||
Date of first compliant deposit: | 28 December 2015 | ||||
Date of first compliant Open Access: | 28 December 2015 | ||||
Funder: | Seventh Framework Programme (European Commission) (FP7) | ||||
Grant number: | 611887 (FP7) | ||||
Title of Event: | EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers | ||||
Location of Event: | Brecia, Italy | ||||
Date(s) of Event: | 7-10 Sep 2014 |
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