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Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond
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UNSPECIFIED (2005) Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond. In: 10th International Workshop on Surface and Bulk Defects in CVD Diamond Films, Diepenbee-Hasselt, BELGIUM, FEB 23-25, 2005. Published in: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 202 (11). pp. 2148-2153. doi:10.1002/pssa.200561905 ISSN 0031-8965.
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Official URL: http://dx.doi.org/10.1002/pssa.200561905
Abstract
The primary beam energy and species (Cs+, Af(+)) dependence of ultra low energy SIMS depth profiles of ultra-shallow boron implants into CVD grown diamond is investigated in this paper. The data are compared with TRIM simulation of the 5 keV B-11(+) implant. Cs+ profiles (1 keV, 30 degrees) appear to be seriously distorted by atomic mixing and recoil implantation due to the high mass of the probe. Ar+ profiles (300 eV-1 keV, 0 degrees) are less distorted, but both Cs+ and Ar+ tend to produce significant tails. The At+ SIMS profiles produce implants which appear to be shallower than the TRIM simulation. We show that profiling using At+ with energies between 0.3 and 1 keV can be used to extrapolate a profile to zero beam energy. The extrapolated data indicate a centroid between 5 and 10 nm from the surface, whereas TRIM predicts 11 nm. (c) 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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Journal or Publication Title: | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | ||||
Publisher: | WILEY-V C H VERLAG GMBH | ||||
ISSN: | 0031-8965 | ||||
Official Date: | September 2005 | ||||
Dates: |
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Volume: | 202 | ||||
Number: | 11 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 2148-2153 | ||||
DOI: | 10.1002/pssa.200561905 | ||||
Publication Status: | Published | ||||
Title of Event: | 10th International Workshop on Surface and Bulk Defects in CVD Diamond Films | ||||
Location of Event: | Diepenbee-Hasselt, BELGIUM | ||||
Date(s) of Event: | FEB 23-25, 2005 |
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