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Characterization of dislocations in germanium layers grown on (011)- and (111)-oriented silicon by coplanar and noncoplanar X-ray diffraction
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Benediktovitch, Andrei, Zhylik, Alexei, Ulyanenkova, Tatjana, Myronov, Maksym and Ulyanenkov, Alexander P. (2015) Characterization of dislocations in germanium layers grown on (011)- and (111)-oriented silicon by coplanar and noncoplanar X-ray diffraction. Journal of applied crystallography, Volume 48 (Number 3). pp. 655-665. 00655. doi:10.1107/S1600576715005397 ISSN 0021-8898.
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Official URL: http://dx.doi.org/10.1107/S1600576715005397
Abstract
Strained germanium grown on silicon with nonstandard surface orientations like (011) or (111) is a promising material for various semiconductor applications, for example complementary metal-oxide semiconductor transistors. However, because of the large mismatch between the lattice constants of silicon and germanium, the growth of such systems is challenged by nucleation and propagation of threading and misfit dislocations that degrade the electrical properties. To analyze the dislocation microstructure of Ge films on Si(011) and Si(111), a set of reciprocal space maps and profiles measured in noncoplanar geometry was collected. To process the data, the approach proposed by Kaganer, Köhler, Schmidbauer, Opitz & Jenichen [Phys. Rev. B, (1997 ▶), 55, 1793–1810] has been generalized to an arbitrary surface orientation, arbitrary dislocation line direction and noncoplanar measurement scheme.
| Item Type: | Journal Article | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Subjects: | Q Science > QC Physics | ||||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||||
| Library of Congress Subject Headings (LCSH): | X-rays -- Diffraction, Metal oxide semiconductors, Germanium alloys | ||||||||
| Journal or Publication Title: | Journal of applied crystallography | ||||||||
| Publisher: | Wiley-Blackwell Publishing Ltd. | ||||||||
| ISSN: | 0021-8898 | ||||||||
| Official Date: | 1 June 2015 | ||||||||
| Dates: |
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| Volume: | Volume 48 | ||||||||
| Number: | Number 3 | ||||||||
| Number of Pages: | 11 | ||||||||
| Page Range: | pp. 655-665 | ||||||||
| Article Number: | 00655 | ||||||||
| DOI: | 10.1107/S1600576715005397 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Open Access (Creative Commons) | ||||||||
| Date of first compliant deposit: | 29 December 2015 | ||||||||
| Date of first compliant Open Access: | 29 December 2015 |
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