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Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning
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Guo, Z., Tian, Yanling, Liu, C., Wang, F., Liu, Xianping, Shirinzadeh, B. and Zhang, D. (2015) Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning. Robotics and Computer-Integrated Manufacturing, 32 . pp. 93-105. doi:10.1016/j.rcim.2014.10.003
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WRAP_Liu_9976741-es-041215-design_and_control_methodology.pdf - Accepted Version - Requires a PDF viewer. Available under License Creative Commons Attribution Non-commercial No Derivatives 4.0. Download (1329Kb) | Preview |
Official URL: http://dx.doi.org/10.1016/j.rcim.2014.10.003
Abstract
A 3-DOF (X–Y–θZ) planar flexure-based mechanism is designed and monolithically manufactured using Wire Electro-Discharge Machining (WEDM) technology. The compact flexure-based mechanism is directly driven by three piezoelectric actuators (PZTs) through decoupling mechanisms. The orthogonal configuration in the x and y directions can guarantee the decoupling translational motion in these axes. The rotational motion and translational displacement in the x direction can be decoupled by controlling the piezoelectric actuators in the x axis with the same displacement values in same and opposite motion directions, respectively. The static and dynamic models of the developed flexure-based mechanism have been developed based on the pseudo-rigid-body model methodology. The mechanical design optimization is conducted to improve the static and dynamic characteristics of the flexure-based mechanism. Finite Element Analyses (FEA) are also carried out to verify the established models and optimization results. A novel hybrid feedforward/feedback controller has been provided to eliminate/reduce the nonlinear hysteresis and external disturbance of the flexure-based mechanism. Experimental testing has been performed to examine the dynamic performance of the developed flexure-based mechanism.
| Item Type: | Journal Article | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Subjects: | T Technology > TS Manufactures | ||||||||||
| Divisions: | Faculty of Science > Engineering | ||||||||||
| Library of Congress Subject Headings (LCSH): | Atomic force microscopy, Scanning tunneling microscopy, Microtechnology, Nanotechnology | ||||||||||
| Journal or Publication Title: | Robotics and Computer-Integrated Manufacturing | ||||||||||
| Publisher: | Elsevier | ||||||||||
| ISSN: | 0736-5845 | ||||||||||
| Official Date: | April 2015 | ||||||||||
| Dates: |
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| Volume: | 32 | ||||||||||
| Page Range: | pp. 93-105 | ||||||||||
| DOI: | 10.1016/j.rcim.2014.10.003 | ||||||||||
| Status: | Peer Reviewed | ||||||||||
| Publication Status: | Published | ||||||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||||||
| Funder: | Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC) | ||||||||||
| Grant number: | 512 75337 , 5117537, |
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