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Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

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Guo, Z., Tian, Yanling, Liu, C., Wang, F., Liu, Xianping, Shirinzadeh, B. and Zhang, D. (2015) Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning. Robotics and Computer-Integrated Manufacturing, 32 . pp. 93-105. doi:10.1016/j.rcim.2014.10.003 ISSN 0736-5845.

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Official URL: http://dx.doi.org/10.1016/j.rcim.2014.10.003

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Abstract

A 3-DOF (X–Y–θZ) planar flexure-based mechanism is designed and monolithically manufactured using Wire Electro-Discharge Machining (WEDM) technology. The compact flexure-based mechanism is directly driven by three piezoelectric actuators (PZTs) through decoupling mechanisms. The orthogonal configuration in the x and y directions can guarantee the decoupling translational motion in these axes. The rotational motion and translational displacement in the x direction can be decoupled by controlling the piezoelectric actuators in the x axis with the same displacement values in same and opposite motion directions, respectively. The static and dynamic models of the developed flexure-based mechanism have been developed based on the pseudo-rigid-body model methodology. The mechanical design optimization is conducted to improve the static and dynamic characteristics of the flexure-based mechanism. Finite Element Analyses (FEA) are also carried out to verify the established models and optimization results. A novel hybrid feedforward/feedback controller has been provided to eliminate/reduce the nonlinear hysteresis and external disturbance of the flexure-based mechanism. Experimental testing has been performed to examine the dynamic performance of the developed flexure-based mechanism.

Item Type: Journal Article
Subjects: T Technology > TS Manufactures
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Atomic force microscopy, Scanning tunneling microscopy, Microtechnology, Nanotechnology
Journal or Publication Title: Robotics and Computer-Integrated Manufacturing
Publisher: Elsevier
ISSN: 0736-5845
Official Date: April 2015
Dates:
DateEvent
April 2015Published
11 November 2014Available
10 October 2014Accepted
28 April 2014Submitted
Volume: 32
Page Range: pp. 93-105
DOI: 10.1016/j.rcim.2014.10.003
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access
Date of first compliant deposit: 15 December 2015
Date of first compliant Open Access: 18 December 2015
Funder: Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC)
Grant number: 512 75337 , 5117537,

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