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Evidence for an iron-hydrogen complex in p-type silicon
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Leonard, S., Markevich, V. P., Peaker, A. R., Hamilton, B. and Murphy, John D. (2015) Evidence for an iron-hydrogen complex in p-type silicon. Applied Physics Letters, 107 (3). 032103. doi:10.1063/1.4927323 ISSN 0003-6951.
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Official URL: http://dx.doi.org/10.1063/1.4927323
Abstract
Interactions of hydrogen with iron have been studied in Fe contaminated p-type Czochralski silicon using capacitance-voltage profiling and deep level transient spectroscopy (DLTS). Hydrogen has been introduced into the samples from a silicon nitride layer grown by plasma enhanced chemical vapor deposition. After annealing of the Schottky diodes on Si:Fe + H samples under reverse bias in the temperature range of 90–120 °C, a trap has been observed in the DLTS spectra which we have assigned to a Fe-H complex. The trap is only observed when a high concentration of hydrogen is present in the near surface region. The trap concentration is higher in samples with a higher concentration of single interstitial Fe atoms. The defect has a deep donor level at Ev + 0.31 eV. Direct measurements of capture cross section of holes have shown that the capture cross section is not temperature dependent and its value is 5.2 × 10−17 cm2. It is found from an isochronal annealing study that the Fe-H complex is not very stable and can be eliminated completely by annealing for 30 min at 125 °C.
Item Type: | Journal Article | ||||||||
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Subjects: | Q Science > QC Physics | ||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||
Journal or Publication Title: | Applied Physics Letters | ||||||||
Publisher: | American Institute of Physics | ||||||||
ISSN: | 0003-6951 | ||||||||
Official Date: | 22 July 2015 | ||||||||
Dates: |
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Volume: | 107 | ||||||||
Number: | 3 | ||||||||
Article Number: | 032103 | ||||||||
DOI: | 10.1063/1.4927323 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||
Funder: | Engineering and Physical Sciences Research Council (EPSRC) | ||||||||
Grant number: | EP/K006975/1 : EP/J01768X/2 |
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