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Design and modelling of solidly mounted resonators for low-cost particle sensing
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Villa-López, Farah Helue, Rughoobur, Girish, Thomas, Sanju, Flewitt, Andrew J., Cole, Marina and Gardner, J. W. (2015) Design and modelling of solidly mounted resonators for low-cost particle sensing. Measurement Science and Technology, 27 (2). 025101. doi:10.1088/0957-0233/27/2/025101
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Official URL: http://dx.doi.org/10.1088/0957-0233/27/2/025101
Abstract
This work presents the design and fabrication of Solidly Mounted Resonator (SMR) devices for the detection of particulate matter (PM2.5 and PM10) in order to develop a smart low-cost particle sensor for air quality. These devices were designed to operate at a resonant frequency of either 870 MHz or 1.5 GHz, employing zinc oxide as the piezoelectric layer and an acoustic mirror made from molybdenum and silicon dioxide layers. Finite element analysis of the acoustic resonators was performed using COMSOL Multiphysics software in order to evaluate the frequency response of the devices and the performance of the acoustic mirror. The zinc oxide based acoustic resonators were fabricated on a silicon substrate using a five mask process. The mass sensitivity of the acoustic resonators was estimated using a 3D finite element model and preliminary testing has been performed. The theoretical and observed mass sensitivity were similar at ca. 145 kHz ng−1 for the 870 MHz resonator when detecting PM2.5 suggesting that SMR devices have potential to be used as part of a miniature smart sensor system for airborne particle detection.
| Item Type: | Journal Article | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Subjects: | T Technology > TD Environmental technology. Sanitary engineering | ||||||||
| Divisions: | Faculty of Science > Engineering | ||||||||
| Library of Congress Subject Headings (LCSH): | Air -- Pollution, Air quality -- Measurement, Finite element method, Air -- Pollution -- Health aspects, Particles | ||||||||
| Journal or Publication Title: | Measurement Science and Technology | ||||||||
| Publisher: | Institute of Physics Publishing Ltd. | ||||||||
| ISSN: | 0957-0233 | ||||||||
| Official Date: | 19 June 2015 | ||||||||
| Dates: |
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| Date of first compliant deposit: | 29 January 2016 | ||||||||
| Volume: | 27 | ||||||||
| Number: | 2 | ||||||||
| Article Number: | 025101 | ||||||||
| DOI: | 10.1088/0957-0233/27/2/025101 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Open Access | ||||||||
| Funder: | Seventh Framework Programme (European Commission) (FP7), National Mexican Council of Science and Technology (CONACYT) |
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