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Design and modelling of solidly mounted resonators for low-cost particle sensing

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Villa-López, Farah Helue, Rughoobur, Girish, Thomas, Sanju, Flewitt, Andrew J., Cole, Marina and Gardner, J. W. (2015) Design and modelling of solidly mounted resonators for low-cost particle sensing. Measurement Science and Technology, 27 (2). 025101. doi:10.1088/0957-0233/27/2/025101

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Official URL: http://dx.doi.org/10.1088/0957-0233/27/2/025101

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Abstract

This work presents the design and fabrication of Solidly Mounted Resonator (SMR) devices for the detection of particulate matter (PM2.5 and PM10) in order to develop a smart low-cost particle sensor for air quality. These devices were designed to operate at a resonant frequency of either 870 MHz or 1.5 GHz, employing zinc oxide as the piezoelectric layer and an acoustic mirror made from molybdenum and silicon dioxide layers. Finite element analysis of the acoustic resonators was performed using COMSOL Multiphysics software in order to evaluate the frequency response of the devices and the performance of the acoustic mirror. The zinc oxide based acoustic resonators were fabricated on a silicon substrate using a five mask process. The mass sensitivity of the acoustic resonators was estimated using a 3D finite element model and preliminary testing has been performed. The theoretical and observed mass sensitivity were similar at ca. 145 kHz ng−1 for the 870 MHz resonator when detecting PM2.5 suggesting that SMR devices have potential to be used as part of a miniature smart sensor system for airborne particle detection.

Item Type: Journal Article
Subjects: T Technology > TD Environmental technology. Sanitary engineering
Divisions: Faculty of Science > Engineering
Library of Congress Subject Headings (LCSH): Air -- Pollution, Air quality -- Measurement, Finite element method, Air -- Pollution -- Health aspects, Particles
Journal or Publication Title: Measurement Science and Technology
Publisher: Institute of Physics Publishing Ltd.
ISSN: 0957-0233
Official Date: 19 June 2015
Dates:
DateEvent
18 December 2015Available
4 November 2015Accepted
19 June 2015Published
Volume: 27
Number: 2
Article Number: 025101
DOI: 10.1088/0957-0233/27/2/025101
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Open Access
Funder: Seventh Framework Programme (European Commission) (FP7), National Mexican Council of Science and Technology (CONACYT)

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