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Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement
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Clark, Leon, Shirinzadeh, Bijan, Tian, Yanling and Oetomo, Denny (2015) Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement. IEEE/ASME Transactions on Mechatronics, 20 (1). pp. 84-92. doi:10.1109/TMECH.2014.2301824
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Official URL: http://dx.doi.org/10.1109/TMECH.2014.2301824
Abstract
This paper presents a novel methodology for position and orientation (pose) measurement of stages used for micro/nano positioning which produce coupled motions with three planar degrees of freedom (DOF). In the proposed methodology, counter-rotation of the entire mechanism prevents the misalignment of the measurement beams within a laser-interferometry-based sensing and measurement technique. To detect such a misalignment, a sensing strategy constructed around a position sensitive diode has been developed. A feedforward-feedback compound controller has been established to provide the necessary counter-rotation input to reduce the misalignment error. Experimental validation has been conducted through the measurement of the workspace of a three-DOF planar micro/nano positioning stage. Experimental results demonstrate the capability of the technique to provide combined linear/angular measurement.
| Item Type: | Journal Article | ||||||
|---|---|---|---|---|---|---|---|
| Subjects: | T Technology > TJ Mechanical engineering and machinery | ||||||
| Divisions: | Faculty of Science > Engineering | ||||||
| Library of Congress Subject Headings (LCSH): | Microtechnology, Nanotechnology | ||||||
| Journal or Publication Title: | IEEE/ASME Transactions on Mechatronics | ||||||
| Publisher: | Institute of Electrical and Electronics Engineers | ||||||
| ISSN: | 1083-4435 | ||||||
| Official Date: | February 2015 | ||||||
| Dates: |
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| Volume: | 20 | ||||||
| Number: | 1 | ||||||
| Number of Pages: | 9 | ||||||
| Page Range: | pp. 84-92 | ||||||
| DOI: | 10.1109/TMECH.2014.2301824 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published | ||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||
| Funder: | Australian Research Council (ARC) | ||||||
| Grant number: | LE0347024 (ARC), LE0775692 (ARC), DP0666366 (ARC), DP110104970 (ARC), DP110104970 (ARC) | ||||||
| Adapted As: |
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