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Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement

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Clark, Leon, Shirinzadeh, Bijan, Tian, Yanling and Oetomo, Denny (2015) Laser-based sensing, measurement, and misalignment control of coupled Linear and angular motion for ultrahigh precision movement. IEEE/ASME Transactions on Mechatronics, 20 (1). pp. 84-92. doi:10.1109/TMECH.2014.2301824

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Official URL: http://dx.doi.org/10.1109/TMECH.2014.2301824

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Abstract

This paper presents a novel methodology for position and orientation (pose) measurement of stages used for micro/nano positioning which produce coupled motions with three planar degrees of freedom (DOF). In the proposed methodology, counter-rotation of the entire mechanism prevents the misalignment of the measurement beams within a laser-interferometry-based sensing and measurement technique. To detect such a misalignment, a sensing strategy constructed around a position sensitive diode has been developed. A feedforward-feedback compound controller has been established to provide the necessary counter-rotation input to reduce the misalignment error. Experimental validation has been conducted through the measurement of the workspace of a three-DOF planar micro/nano positioning stage. Experimental results demonstrate the capability of the technique to provide combined linear/angular measurement.

Item Type: Journal Article
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Microtechnology, Nanotechnology
Journal or Publication Title: IEEE/ASME Transactions on Mechatronics
Publisher: Institute of Electrical and Electronics Engineers
ISSN: 1083-4435
Official Date: February 2015
Dates:
DateEvent
February 2015Published
7 February 2015Accepted
Volume: 20
Number: 1
Number of Pages: 9
Page Range: pp. 84-92
DOI: 10.1109/TMECH.2014.2301824
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access
Funder: Australian Research Council (ARC)
Grant number: LE0347024 (ARC), LE0775692 (ARC), DP0666366 (ARC), DP110104970 (ARC), DP110104970 (ARC)
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