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Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

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Cai, Kunhai, Tian, Yanling, Wang, Fujun, Zhang, Dawei and Shirinzadeh, Bijan (2015) Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism. Robotics and Computer-Integrated Manufacturing, 37 . pp. 125-138. doi:10.1016/j.rcim.2015.07.004

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Official URL: http://dx.doi.org/10.1016/j.rcim.2015.07.004

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Abstract

This paper presents a 3-DOF (Degree of freedom) stage with T-shape flexible hinge mechanism for the applications in the precision measurement equipments and micro/nano manipulation systems. The stage is driven by three piezoelectric actuators (PEAs) and guided by a flexible hinge based mechanism with three symmetric T-shape hinges. The proposed T-shape flexible hinge mechanism can provide excellent planar motion capability with high stability, and thus guarantee the outstanding dynamics characteristics. The theoretical modeling of the stage was carried out and the stiffness and the dynamic resonance frequency have been obtained. The kinematic model of the 3-DOF stage was established and the workspace has been analyzed. The characteristics of the stage were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the stage, through this stage, X-axis translational motion stroke of 6.9 µm, Y-axis translational motion stroke of 8.5 µm and rotational motion stroke along Z-axis of 289 µrad can be achieved. A hybrid feedforward/feedback control methodology has been proposed to eliminate the nonlinear hysteresis, the trajectory tracking performances and to reduce external disturbance of the 3-DOF stage.

Item Type: Journal Article
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH): Hinges, Piezoelectric devices
Journal or Publication Title: Robotics and Computer-Integrated Manufacturing
Publisher: Elsevier
ISSN: 0736-5845
Official Date: 2 September 2015
Dates:
DateEvent
2 September 2015Published
24 July 2015Accepted
16 January 2015Submitted
Volume: 37
Number of Pages: 14
Page Range: pp. 125-138
DOI: 10.1016/j.rcim.2015.07.004
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access
Funder: Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC), Reserved Academic Program of Peiyang Scholar
Grant number: 51175372 (NSFC), 51275337 (NSFC), NCET-11-0374

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