Santra, S., De Luca, A., Bhaumik, S., Ali, S. Z., Udrea, F., Gardner, J. W., Ray, S. K. and Guha, P. K. (2015) Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing. RSC Advances , 5 (59). pp. 47609-47616. doi:10.1039/c5ra04584c ISSN 2046-2069.

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Abstract

This paper reports on the novel deposition of zinc oxide (ZnO) nanorods using a dip pen nanolithographic (DPN) technique on SOI (silicon on insulator) CMOS MEMS (micro electro mechanical system) micro-hotplates (MHP) and their characterisation as a low-cost, low-power ethanol sensor. The ZnO nanorods were synthesized hydrothermally and deposited on the MHP that comprise a tungsten micro-heater embedded in a dielectric membrane with gold interdigitated electrodes (IDEs) on top of an oxide passivation layer. The micro-heater and IDEs were used to heat up the sensing layer and measure its resistance, respectively. The sensor device is extremely power efficient because of the thin SOI membrane. The electro-thermal efficiency of the MHP was found to be 8.2 °C mW−1, which results in only 42.7 mW power at an operating temperature of 350 °C. The CMOS MHP devices with ZnO nanorods were exposed to PPM levels of ethanol in humid air. The sensitivity achieved from the sensor was found to be 5.8% ppm−1 to 0.39% ppm−1 for the ethanol concentration range 25–1000 ppm. The ZnO nanorods showed an optimum response at 350 °C. The CMOS sensor was found to have a humidity dependence that needs consideration in real-world application. The sensors were also found to be selective towards ethanol when tested in the presence of toluene and acetone. We believe that the integration of ZnO nanorods using DPN lithography with a CMOS MEMS substrate offers a low cost, low power, smart ethanol sensor that could be exploited in consumer electronics.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Chemical detectors, Metal oxide semiconductors, Complementary, Microelectromechanical systems, Zinc oxide, Nanolithography
Journal or Publication Title:	RSC Advances
Publisher:	Royal Society of Chemistry
ISSN:	2046-2069
Official Date:	20 May 2015
Dates:	Date Event 20 May 2015 Published 18 May 2015 Accepted 16 March 2015 Submitted
Volume:	5
Number:	59
Page Range:	pp. 47609-47616
DOI:	10.1039/c5ra04584c
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Date of first compliant deposit:	2 September 2016
Date of first compliant Open Access:	2 September 2016
Funder:	India. Department of Science and Technology (DST), Seventh Framework Programme (European Commission) (FP7)
Grant number:	SR/S2/RJN-104/2011 (DST), 288481 (FP7), 2852754 (FP7), 611887 (FP7)

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