UNSPECIFIED (2003) Combined smart chemFET/resistive sensor array. In: 2nd IEEE International Conference on Sensors, OCT 22-24, 2003, Toronto, CANADA.

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Abstract

Here we describe a novel CMOS compatible gas sensor array based on a combined resistive/chemFET sensor cell. We have fabricated an array of 70 sensors with integrated drive, gain and baseline removal circuitry using an AMS 0.6 mum CMOS process. The sensing materials are carbon black/polymer composite (CB) thin films, which have been previously reported to have good vapour-sensing properties. Different CB films have been deposited onto the sensor array and have been shown to respond differently to volatile organic compounds. This combined sensing element both reduces silicon area and, more importantly, measures different physical properties of the same gas sensitive material improving discrimination and giving more insight into the sensing mechanism.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Series Name:	IEEE Sensors
Journal or Publication Title:	PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2
Publisher:	IEEE
ISBN:	0-7803-8133-5
ISSN:	1930-0395
Date:	2003
Number of Pages:	4
Page Range:	pp. 1120-1123
Publication Status:	Published
Title of Event:	2nd IEEE International Conference on Sensors
Location of Event:	Toronto, CANADA
Date(s) of Event:	OCT 22-24, 2003
URI:	http://wrap.warwick.ac.uk/id/eprint/7723

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