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A controlled-force stylus displacement probe
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Chetwynd, D. G., Liu, Xianping and Smith, S. T. (1996) A controlled-force stylus displacement probe. Precision Engineering, 19 (2-3). pp. 105-111. doi:10.1016/S0141-6359(96)00008-6 ISSN 0141-6359.
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Official URL: http://dx.doi.org/10.1016/S0141-6359(96)00008-6
Abstract
A novel design of displacement profiler with a controllable stylus force is presented. It provides highly controlled conditions for contact measurement of, for example, small step heights or surface roughness. Incorporating an electromagnetic force actuator and force feedback control, the profiler provides electronically selectable contact force in the range of 0.01–10 mN and gives a constant static and dynamic loading. In a typical configuration, it has a range of a few micrometers with a discrimination to better than 1 nm at a bandwidth higher than that of a conventional stylus instrument.
| Item Type: | Journal Article | ||||||
|---|---|---|---|---|---|---|---|
| Subjects: | T Technology > T Technology (General) T Technology > TJ Mechanical engineering and machinery |
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| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
| Journal or Publication Title: | Precision Engineering | ||||||
| Publisher: | Elsevier Science Inc. | ||||||
| ISSN: | 0141-6359 | ||||||
| Official Date: | October 1996 | ||||||
| Dates: |
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| Volume: | 19 | ||||||
| Number: | 2-3 | ||||||
| Page Range: | pp. 105-111 | ||||||
| DOI: | 10.1016/S0141-6359(96)00008-6 | ||||||
| Status: | Peer Reviewed | ||||||
| Publication Status: | Published |
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