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Improvement of the fidelity of surface measurement by active damping control
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Liu, Xianping, Chetwynd, D. G., Smith, S. T. and Wang, W. (1993) Improvement of the fidelity of surface measurement by active damping control. Measurement Science and Technology, 4 (12). pp. 1330-1340. doi:10.1088/0957-0233/4/12/004 ISSN 0957-0233.
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Official URL: http://dx.doi.org/10.1088/0957-0233/4/12/004
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | Q Science > Q Science (General) | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Measurement Science and Technology | ||||
| Publisher: | Institute of Physics Publishing Ltd. | ||||
| ISSN: | 0957-0233 | ||||
| Official Date: | 1993 | ||||
| Dates: |
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| Volume: | 4 | ||||
| Number: | 12 | ||||
| Page Range: | pp. 1330-1340 | ||||
| DOI: | 10.1088/0957-0233/4/12/004 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
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