Thomas, Sanju, Cole, Marina, Villa-López, Farah Helue and Gardner, J. W. (2016) High frequency surface acoustic wave resonator-based sensor for particulate matter detection. Sensors and Actuators A: Physical, 244 . pp. 138-145. doi:10.1016/j.sna.2016.04.003 ISSN 0924-4247.

Preview

PDF WRAP_9671463-es-070416-sens_act_a_2016_hf_sawr_particle_sensor.pdf - Accepted Version - Requires a PDF viewer. Download (953Kb) | Preview

Request Changes to record.

Abstract

This paper describes the characterization of high frequency Surface Acoustic Wave Resonator-based (SAWR) sensors, for the detection of micron and sub-micron sized particles. The sensor comprises two 262 MHz ST-cut quartz based Rayleigh wave SAWRs where one is used for particle detection and the other as a reference. Electro-acoustic detection of different sized particles shows a strong relationship between mass sensitivity (Δf/Δm) and particle diameter (Dp). This enables frequency-dependent SAWR sensitivity to be tailored to the size of particles, thus making these types of sensors good candidates for PM10, PM2.5 and ultrafine particle (UFP) detection. Our initial characterisation demonstrated a typical SAWR frequency shift of 60 Hz in response to a deposition of ca. 0.21 ng of 0.75 μm-sized gold particles (∼50 particles) on sensor’s surface. Sensor responses to different size particles, such as ∼30 μm diameter silicon, gold (diameters of ∼0.75 μm and ∼20 μm), ∼8 μm fine sugar, PTFE (∼1 μm and ∼15 μm), ∼4 μm talcum powder, and ∼2 μm molybdenum powder were evaluated, and an average mass sensitivity of 275 Hz/ng was obtained. Based on the results obtained in this study we believe that acoustic wave technology has great potential for application in airborne particle detection. Moreover, acoustic resonator devices can be integrated with CMOS interface circuitry to obtain sensitive, robust, low-power and low-cost particle detectors for variety of applications including outdoor environmental monitoring.

Item Type:	Journal Article
Subjects:	Q Science > QC Physics
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Acoustic surface waves, Particles
Journal or Publication Title:	Sensors and Actuators A: Physical
Publisher:	Elsevier Science BV
ISSN:	0924-4247
Official Date:	15 June 2016
Dates:	Date Event 15 June 2016 Published 6 April 2016 Available 4 April 2016 Accepted 23 June 2015 Submitted
Volume:	244
Page Range:	pp. 138-145
DOI:	10.1016/j.sna.2016.04.003
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Date of first compliant deposit:	7 April 2016
Date of first compliant Open Access:	6 April 2017

Request changes or add full text files to a record

Repository staff actions (login required)

View Item

Downloads