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High frequency surface acoustic wave resonator-based sensor for particulate matter detection
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Thomas, Sanju, Cole, Marina, Villa-López, Farah Helue and Gardner, J. W. (2016) High frequency surface acoustic wave resonator-based sensor for particulate matter detection. Sensors and Actuators A: Physical, 244 . pp. 138-145. doi:10.1016/j.sna.2016.04.003 ISSN 0924-4247.
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WRAP_9671463-es-070416-sens_act_a_2016_hf_sawr_particle_sensor.pdf - Accepted Version - Requires a PDF viewer. Download (953Kb) | Preview |
Official URL: http://dx.doi.org/10.1016/j.sna.2016.04.003
Abstract
This paper describes the characterization of high frequency Surface Acoustic Wave Resonator-based (SAWR) sensors, for the detection of micron and sub-micron sized particles. The sensor comprises two 262 MHz ST-cut quartz based Rayleigh wave SAWRs where one is used for particle detection and the other as a reference. Electro-acoustic detection of different sized particles shows a strong relationship between mass sensitivity (Δf/Δm) and particle diameter (Dp). This enables frequency-dependent SAWR sensitivity to be tailored to the size of particles, thus making these types of sensors good candidates for PM10, PM2.5 and ultrafine particle (UFP) detection. Our initial characterisation demonstrated a typical SAWR frequency shift of 60 Hz in response to a deposition of ca. 0.21 ng of 0.75 μm-sized gold particles (∼50 particles) on sensor’s surface. Sensor responses to different size particles, such as ∼30 μm diameter silicon, gold (diameters of ∼0.75 μm and ∼20 μm), ∼8 μm fine sugar, PTFE (∼1 μm and ∼15 μm), ∼4 μm talcum powder, and ∼2 μm molybdenum powder were evaluated, and an average mass sensitivity of 275 Hz/ng was obtained. Based on the results obtained in this study we believe that acoustic wave technology has great potential for application in airborne particle detection. Moreover, acoustic resonator devices can be integrated with CMOS interface circuitry to obtain sensitive, robust, low-power and low-cost particle detectors for variety of applications including outdoor environmental monitoring.
Item Type: | Journal Article | ||||||||||
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Subjects: | Q Science > QC Physics | ||||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||
Library of Congress Subject Headings (LCSH): | Acoustic surface waves, Particles | ||||||||||
Journal or Publication Title: | Sensors and Actuators A: Physical | ||||||||||
Publisher: | Elsevier Science BV | ||||||||||
ISSN: | 0924-4247 | ||||||||||
Official Date: | 15 June 2016 | ||||||||||
Dates: |
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Volume: | 244 | ||||||||||
Page Range: | pp. 138-145 | ||||||||||
DOI: | 10.1016/j.sna.2016.04.003 | ||||||||||
Status: | Peer Reviewed | ||||||||||
Publication Status: | Published | ||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||
Date of first compliant deposit: | 7 April 2016 | ||||||||||
Date of first compliant Open Access: | 6 April 2017 |
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