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Si1-x Ge x /Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing
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Morris, R. J. H. (Richard J. H.), Hase, Thomas P. A., Sánchez, Ana M. and Rowlands, G. (George) (2016) Si1-x Ge x /Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing. Journal of The American Society for Mass Spectrometry, 27 (10). pp. 1694-1702. doi:10.1007/s13361-016-1439-4
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Official URL: http://dx.doi.org/10.1007/s13361-016-1439-4
Abstract
The utility of energy sequencing for extracting an accurate matrix level interface profile using ultra-low energy SIMS (uleSIMS) is reported. Normally incident O2 + over an energy range of 0.25–2.5 keV were used to probe the interface between Si0.73Ge0.27/Si, which was also studied using high angle annular dark field scanning transmission electron microscopy (HAADF-STEM). All the SIMS profiles were linearized by taking the well understood matrix effects on ion yield and erosion rate into account. A method based on simultaneous fitting of the SIMS profiles measured at different energies is presented, which allows the intrinsic sample profile to be determined to sub-nanometer precision. Excellent agreement was found between the directly imaged HAADF-STEM interface and that derived from SIMS.
| Item Type: | Journal Article | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Subjects: | Q Science > QD Chemistry | ||||||||||
| Divisions: | Faculty of Science > Physics | ||||||||||
| Library of Congress Subject Headings (LCSH): | Secondary ion mass spectrometry, Metrology | ||||||||||
| Journal or Publication Title: | Journal of The American Society for Mass Spectrometry | ||||||||||
| Publisher: | Springer New York LLC | ||||||||||
| ISSN: | 1044-0305 | ||||||||||
| Official Date: | October 2016 | ||||||||||
| Dates: |
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| Date of first compliant deposit: | 13 February 2017 | ||||||||||
| Volume: | 27 | ||||||||||
| Number: | 10 | ||||||||||
| Page Range: | pp. 1694-1702 | ||||||||||
| DOI: | 10.1007/s13361-016-1439-4 | ||||||||||
| Status: | Peer Reviewed | ||||||||||
| Publication Status: | Published | ||||||||||
| Access rights to Published version: | Restricted or Subscription Access |
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