Cai, Kunhai, Tian, Yanling, Wang, Fujun, Zhang, Dawei, Liu, Xianping and Shirinzadeh, Bijan (2017) Design and control of a 6-degree-of-freedom precision positioning system. Robotics and Computer-Integrated Manufacturing, 44 . pp. 77-96. doi:10.1016/j.rcim.2016.08.005

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Abstract

This paper presents the design and test of a6-degree-of-freedom (DOF) precision positioning system, which is assembledby two different 3-DOF precision positioning stages each driven by three piezoelectric actuators (PEAs). Based on the precision PEAs and flexure hinge mechanisms, high precision motion is obtained.The design methodology and kinematic characteristics of the6-DOF positioning system areinvestigated. According to an effective kinematic model, the transformation matrices are obtained, which is used to predict the relationship between the output displacement from the system arrangement and the amountof PEAsexpansion. In addition, the static and dynamic characteristics of the 6-DOF system have been evaluated by finite element method (FEM) simulation andexperiments. The design structure provides a high dynamic bandwidth withthe first naturalfrequency of 586.3 Hz.Decoupling control is proposed to solve the existing coupling motion of the 6-DOF system. Meanwhile, in order to compensate for the hysteresis of PEAs, the inverse Bouc-Wen model was applied as a feedforward hysteresis compensator in the feedforward/feedback hybrid control method. Finally, extensive experiments were performed to verify the tracking performance of the developed mechanism.

Item Type:	Journal Article
Subjects:	T Technology > TJ Mechanical engineering and machinery
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Robotics, Machinery, Kinematics of
Journal or Publication Title:	Robotics and Computer-Integrated Manufacturing
Publisher:	Elsevier
ISSN:	0736-5845
Official Date:	April 2017
Dates:	Date Event April 2017 Published 17 August 2016 Available 1 August 2016 Accepted 24 October 2015 Submitted
Volume:	44
Page Range:	pp. 77-96
DOI:	10.1016/j.rcim.2016.08.005
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Funder:	Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC)
Grant number:	51175372, 51275337, 51205279, 51420105007, NCET-11-0374, 13JCQNJC04100

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