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Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator
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Prasad, Abhinav, Charmet, Jérôme and Seshia, Ashwin A. (2016) Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator. Sensors and Actuators A: Physical, 238 . pp. 207-214. doi:10.1016/j.sna.2015.12.013
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Official URL: http://dx.doi.org/10.1016/j.sna.2015.12.013
Abstract
A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84–3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.
Item Type: | Journal Article | ||||||||||
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Divisions: | Faculty of Science > WMG (Formerly the Warwick Manufacturing Group) | ||||||||||
Journal or Publication Title: | Sensors and Actuators A: Physical | ||||||||||
Publisher: | Elsevier Science BV | ||||||||||
ISSN: | 0924-4247 | ||||||||||
Official Date: | 1 February 2016 | ||||||||||
Dates: |
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Volume: | 238 | ||||||||||
Page Range: | pp. 207-214 | ||||||||||
DOI: | 10.1016/j.sna.2015.12.013 | ||||||||||
Status: | Peer Reviewed | ||||||||||
Publication Status: | Published | ||||||||||
Access rights to Published version: | Restricted or Subscription Access |
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