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Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator

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Prasad, Abhinav, Charmet, Jérôme and Seshia, Ashwin A. (2016) Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator. Sensors and Actuators A: Physical, 238 . pp. 207-214. doi:10.1016/j.sna.2015.12.013

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Official URL: http://dx.doi.org/10.1016/j.sna.2015.12.013

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Abstract

A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84–3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.

Item Type: Journal Article
Divisions: Faculty of Science > WMG (Formerly the Warwick Manufacturing Group)
Journal or Publication Title: Sensors and Actuators A: Physical
Publisher: Elsevier Science BV
ISSN: 0924-4247
Official Date: 1 February 2016
Dates:
DateEvent
1 February 2016Published
12 December 2015Available
9 December 2015Accepted
22 July 2015Submitted
Volume: 238
Page Range: pp. 207-214
DOI: 10.1016/j.sna.2015.12.013
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access

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