Prasad, Abhinav, Charmet, Jérôme and Seshia, Ashwin A. (2016) Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator. Sensors and Actuators A: Physical, 238 . pp. 207-214. doi:10.1016/j.sna.2015.12.013

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Abstract

A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84–3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.

Item Type:	Journal Article
Divisions:	Faculty of Science > WMG (Formerly the Warwick Manufacturing Group)
Journal or Publication Title:	Sensors and Actuators A: Physical
Publisher:	Elsevier Science BV
ISSN:	0924-4247
Official Date:	1 February 2016
Dates:	Date Event 1 February 2016 Published 12 December 2015 Available 9 December 2015 Accepted 22 July 2015 Submitted
Volume:	238
Page Range:	pp. 207-214
DOI:	10.1016/j.sna.2015.12.013
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access

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