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3D numerical simulation of novel SOI MOSFET based gas sensors
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Setiadi, D., Udrea, F., Milne, W. I., Covington, James A. and Gardner, J. W. (1999) 3D numerical simulation of novel SOI MOSFET based gas sensors. In: Chemical Sensors IV, Proceedings of the Symposium, San Diego, CA, 1999. Published in: Proceedings (Electrochemical Society), 99 (23). pp. 416-419. ISBN 9781566772464.
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Official URL: https://www.worldcat.org/title/chemical-sensors-iv...
Abstract
This paper describes 3D numerical simulations of high temperature gas sensors based on SOI technology. A microheater is made of an SOI MOSFET device based on the self-heating. This new generation of integrated gas sensors has low power consumption (less than or equal to 25 mW) and uniform temperature distribution within the active area for a target temperature of 400 degrees C. The fabrication of the sensor is fully compatible with standard CMOS SOI technology The sensor has the enhanced thermal stability required at high operating temperatures, and improved device controllability due to MOS gate control.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Series Name: | ELECTROCHEMICAL SOCIETY SERIES | ||||
| Journal or Publication Title: | Proceedings (Electrochemical Society) | ||||
| Publisher: | Pennington, NJ : Electrochemical Society | ||||
| ISBN: | 9781566772464 | ||||
| Book Title: | Chemical sensors IV : proceedings of the symposium | ||||
| Official Date: | 1999 | ||||
| Dates: |
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| Volume: | 99 | ||||
| Number: | 23 | ||||
| Number of Pages: | 456 | ||||
| Page Range: | pp. 416-419 | ||||
| Status: | Not Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Reuse Statement (publisher, data, author rights): | Chemical Sensor IV Symposium, HONOLULU, HI, OCT 17-22, 1999 | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | Chemical Sensors IV, Proceedings of the Symposium | ||||
| Type of Event: | Conference | ||||
| Location of Event: | San Diego, CA | ||||
| Date(s) of Event: | 1999 |
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