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Observations of modal interaction in lateral bulk acoustic resonators
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Charmet, Jérôme, Daly, Rónán, Thiruvenkatanathan, Pradyumna, Woodhouse, Jim and Seshia, Ashwin A. (2014) Observations of modal interaction in lateral bulk acoustic resonators. Applied Physics Letters, 105 (1). 013502. doi:10.1063/1.4887015 ISSN 0003-6951.
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Official URL: http://dx.doi.org/10.1063/1.4887015
Abstract
High Q factor resonators, such as micro-electro-mechanical systems based lateral bulk acoustic resonators excited in their primary in-plane modes, are promising candidates for timing and frequency reference applications as well as gravimetric bio-sensing. The excitation and detection of out-of-plane modes is often assumed to be unlikely in such devices. However, we report observations of modal interaction with out-of-plane spurious modes that reduces the Q factor of the in-plane modes by up to a factor 3. We also show that the appearance of the spurious modes is unpredictable, and therefore, we propose statistical metrics to minimize the risk of modal interaction.
Item Type: | Journal Article | ||||||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||||||
Journal or Publication Title: | Applied Physics Letters | ||||||||
Publisher: | American Institute of Physics | ||||||||
ISSN: | 0003-6951 | ||||||||
Official Date: | 7 July 2014 | ||||||||
Dates: |
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Volume: | 105 | ||||||||
Number: | 1 | ||||||||
Article Number: | 013502 | ||||||||
DOI: | 10.1063/1.4887015 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Restricted or Subscription Access |
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