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Functionalization of parylene during its chemical vapor deposition
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Naddaka, Maria, Asen, Florian, Freza, Sylwia, Bobrowski, Maciej, Skurski, Piotr, Laux, Edith, Charmet, Jérôme, Keppner, Herbert, Bauer, Monika and Lellouche, Jean-Paul (2011) Functionalization of parylene during its chemical vapor deposition. Journal of Polymer Science Part A: Polymer Chemistry, 49 (13). pp. 2952-2958. doi:10.1002/pola.24731 ISSN 0887-624X.
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Official URL: http://dx.doi.org/10.1002/pola.24731
Abstract
Two possible mechanisms for the reaction of four halogenated (metha)acrylate-based molecules with Parylene [poly (paraxylylene)] during its chemical vapor deposition were proposed. The chemical reactivity of acrylate double bond with the paraxylylene biradical was calculated for all four (metha)acrylate-based molecules. These calculations allowed the evaluation of the energetically favorable mechanism and indeed a direct correlation was found between both predicted and experimental reactivities. Next, the reactivity of the (metha)acrylate-modified Parylene films was evaluated through their reaction with different amines. The obtained amidated Parylene films were characterized with X-ray photoelectron spectroscopy, Kaiser test for primary amines, and fluorescence microscopy. The strong reactivity of (metha)acrylate-modified Parylene films toward nucleophilic substitution emphasizes a general method for the functionalization of self-supported Parylene films grown on the reacting solutions using the novel solid on liquid deposition process. This paves the way to the development of multifunctional materials in a one-step process resulting from the deposition Parylene over liquid patterns.
Item Type: | Journal Article | ||||||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||||||
Journal or Publication Title: | Journal of Polymer Science Part A: Polymer Chemistry | ||||||||
Publisher: | John Wiley & Sons Ltd. | ||||||||
ISSN: | 0887-624X | ||||||||
Official Date: | 1 July 2011 | ||||||||
Dates: |
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Volume: | 49 | ||||||||
Number: | 13 | ||||||||
Page Range: | pp. 2952-2958 | ||||||||
DOI: | 10.1002/pola.24731 | ||||||||
Status: | Peer Reviewed | ||||||||
Publication Status: | Published | ||||||||
Access rights to Published version: | Restricted or Subscription Access |
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