Urasinska-Wojcik, Barbara, Vincent, Timothy A., Chowdhury, Mohamed F. and Gardner, J. W. (2017) Ultrasensitive WO3 gas sensors for NO2 detection in air and low oxygen environment. Sensors and Actuators B: Chemical, 239 . pp. 1051-1059. doi:10.1016/j.snb.2016.08.080 ISSN 0925-4005.

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Abstract

We report here on the results of a study into the response of a tungsten oxide based low power MEMS gas sensor to ppb of nitrogen dioxide at low levels of ambient oxygen. It was found that the resistive gas sensors not only had a high sensitivity to NO2 (3.4%/ppb vs. 0.2%/ppb obtained for commercial MOX) but can still operate reliably at lower oxygen levels (down to 0.5%) - albeit with slightly longer response and recovery times. The optimal operating temperature was determined to be ca. 350 °C and so easily within the range of a MEMS based SOI CMOS substrate. The response was sensitive to significant changes in ambient humidity, but was found to have low cross-sensitivity to CO, hydrogen, methane, and acetone even at much higher ppm levels. We believe that these tungsten oxide gas sensors could be exploited in harsh applications, i.e. with a low oxygen (lean) environment often associated in the exhaust gases from combustion systems.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology > TP Chemical technology
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Microelectromechanical systems, Gas detectors, Automobiles -- Motors -- Exhaust gas, Waste gases -- Combustion, Metallic oxides, Nitrogen dioxide
Journal or Publication Title:	Sensors and Actuators B: Chemical
Publisher:	Elsevier Science SA
ISSN:	0925-4005
Official Date:	1 February 2017
Dates:	Date Event 1 February 2017 Published 16 August 2016 Available 15 August 2016 Accepted 5 February 2016 Submitted
Volume:	239
Page Range:	pp. 1051-1059
DOI:	10.1016/j.snb.2016.08.080
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Date of first compliant deposit:	15 December 2016
Date of first compliant Open Access:	16 July 2017
Funder:	Engineering and Physical Sciences Research Council (EPSRC)
Grant number:	EP/L018330/1
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