Cai, Kunhai, Tian, Yanling, Wang, Fujun, Zhang, Dawei, Liu, Xianping and Shirinzadeh, Bijan (2017) Modeling and tracking control of a novel XYθz stage. Microsystem Technologies, 23 (8). pp. 3575-3588. doi:10.1007/s00542-016-3258-8 ISSN 0946-7076.

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Abstract

A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.

Item Type:	Journal Article
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Microtechnology -- Testing, Electric metal-cutting, Piezoelectric transducers , Hysteresis
Journal or Publication Title:	Microsystem Technologies
Publisher:	Springer
ISSN:	0946-7076
Official Date:	August 2017
Dates:	Date Event August 2017 Published 11 January 2017 Available 11 January 2017 Accepted
Volume:	23
Number:	8
Page Range:	pp. 3575-3588
DOI:	10.1007/s00542-016-3258-8
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Date of first compliant deposit:	24 January 2017
Date of first compliant Open Access:	11 January 2018
Funder:	Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC), China Scholarship Council (CSC), Tianjin da xue (Tianjin University)
Grant number:	51275337, 51205279, 51675371, 51420105007 (NSFC)

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