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Microfluidic devices fabricated using fast wafer-scale LED-Lithography patterning
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Challa, Pavan K., Kartanas, Tadas, Charmet, Jérôme and Knowles, Tuomas P. J. (2017) Microfluidic devices fabricated using fast wafer-scale LED-Lithography patterning. Biomicrofluidics, 11 (1). 014113 . doi:10.1063/1.4976690 ISSN 1932-1058 .
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Official URL: https://doi.org/10.1063/1.4976690
Abstract
Current lithography approaches underpinning the fabrication of microfluidic devices rely on UV exposure of photoresists to define microstructures in these materials. Conventionally, this objective is achieved with gas discharge mercury lamps which are capable of producing high intensity UV radiation. However, these sources
are costly, have a comparatively short lifetime, necessitate regular calibration, and require significant time to warm up prior to exposure taking place. To address these limitations in this paper we exploit advances in solid state sources in the UV range and describe a fast and robust wafer-scale laboratory exposure system relying entirely on UV-LED illumination. As an illustration of the potential of this system for fast and low-cost microfluidic device production, we demonstrate the microfabrication of a 3D spray-drying microfluidic device and a 3D double junction microdroplet maker device.
Item Type: | Journal Article | ||||||
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Alternative Title: | |||||||
Subjects: | Q Science > Q Science (General) T Technology > T Technology (General) |
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||||
Library of Congress Subject Headings (LCSH): | Fluidic devices., Microfluidics., Photolithography., Microelectromechanical systems | ||||||
Journal or Publication Title: | Biomicrofluidics | ||||||
Publisher: | A I P Publishing | ||||||
ISSN: | 1932-1058 | ||||||
Official Date: | January 2017 | ||||||
Dates: |
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Volume: | 11 | ||||||
Number: | 1 | ||||||
Article Number: | 014113 | ||||||
DOI: | 10.1063/1.4976690 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||
Date of first compliant deposit: | 7 February 2017 | ||||||
Date of first compliant Open Access: | 8 February 2017 |
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