A micromachined planar pellistor using an electrochemically deposited nanostructured catalyst
UNSPECIFIED (2002) A micromachined planar pellistor using an electrochemically deposited nanostructured catalyst. In: 6th Symposium on Microfabricated Systems and MEMS, MAY 12-17, 2002, PHILADELPHIA, PA.Full text not available from this repository.
Electrochemical deposition from lyotropic liquid crystalline template solution has been used to deposit H-1 nanostructured palladium films onto a specially designed microfabricated silicon hotplate structure to make planar pellistors, The H-1-e palladium films have very high surface areas and, when heated to around 500 degreesC in air, are converted into highly active catalyst layers for the oxidation of methane. This approach to the deposition of catalysts onto microcalorimetric; gas sensor structures gives a unique degree of control over the localisation of the catalyst on the structure, the thickness of the catalyst layer, the size of the pores in the catalyst and the topology of those pores.
|Item Type:||Conference Item (UNSPECIFIED)|
|Subjects:||Q Science > QD Chemistry
T Technology > TK Electrical engineering. Electronics Nuclear engineering
|Series Name:||ELECTROCHEMICAL SOCIETY SERIES|
|Journal or Publication Title:||MICROFABRICATED SYSTEMS AND MEMS VI, PROCEEDINGS|
|Publisher:||ELECTROCHEMICAL SOCIETY INC|
|Editor:||Hesketh, P and Ang, SS and Davidson, JL and Hughes, HG and Misra, D|
|Number of Pages:||8|
|Page Range:||pp. 24-31|
|Title of Event:||6th Symposium on Microfabricated Systems and MEMS|
|Location of Event:||PHILADELPHIA, PA|
|Date(s) of Event:||MAY 12-17, 2002|
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