UNSPECIFIED (2002) Theoretical aspects of surface nanometrology. In: 2nd International Symposium on Instrumentation Science and Technology (ISIST 2002), AUG 18-22, 2002, JINAN, PEOPLES R CHINA.

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Abstract

Miniaturization has forced surface texture, form and size together making independent assessment difficult. This paper indicates the way that texture and form change character at the nano level and show how Markov and fractal mechanisms occur in manufacture. Some ways in which surface performance and measurement change with scale of size are also explored.

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology > TL Motor vehicles. Aeronautics. Astronautics Q Science > QD Chemistry
Journal or Publication Title:	PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1
Publisher:	HARBIN INSTITUTE TECHNOLOGY PUBLISHERS
ISBN:	7-5603-1768-5
Editor:	Tan, JB and Wen, XF
Date:	2002
Number of Pages:	15
Page Range:	pp. 1-15
Publication Status:	Published
Title of Event:	2nd International Symposium on Instrumentation Science and Technology (ISIST 2002)
Location of Event:	JINAN, PEOPLES R CHINA
Date(s) of Event:	AUG 18-22, 2002
URI:	http://wrap.warwick.ac.uk/id/eprint/8996

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