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Some topics in surface and nanometrology
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UNSPECIFIED (2003) Some topics in surface and nanometrology. In: Conference on Optical Measurement Systems for Industrial Inspection III, MUNICH, GERMANY, JUN 23-26, 2003. Published in: OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III, 5144 pp. 1-16. ISBN 0-8194-5014-6. ISSN 0277-786X.
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Abstract
Some problems associated with surface metrology instrumentation and theory are discussed. In particular problems in Nanometrology are highlighted with reference to Markov processes and fractal analysis. A systems approach to surface characterization is suggested.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics | ||||
Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) | ||||
Journal or Publication Title: | OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III | ||||
Publisher: | SPIE-INT SOC OPTICAL ENGINEERING | ||||
ISBN: | 0-8194-5014-6 | ||||
ISSN: | 0277-786X | ||||
Editor: | Osten, W and Creath, K and Kujawinska, M | ||||
Official Date: | 2003 | ||||
Dates: |
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Volume: | 5144 | ||||
Number of Pages: | 16 | ||||
Page Range: | pp. 1-16 | ||||
Publication Status: | Published | ||||
Title of Event: | Conference on Optical Measurement Systems for Industrial Inspection III | ||||
Location of Event: | MUNICH, GERMANY | ||||
Date(s) of Event: | JUN 23-26, 2003 |
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