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Some topics in surface and nanometrology
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UNSPECIFIED (2003) Some topics in surface and nanometrology. In: Conference on Optical Measurement Systems for Industrial Inspection III, JUN 23-26, 2003, MUNICH, GERMANY.
Full text not available from this repository.Abstract
Some problems associated with surface metrology instrumentation and theory are discussed. In particular problems in Nanometrology are highlighted with reference to Markov processes and fractal analysis. A systems approach to surface characterization is suggested.
| Item Type: | Conference Item (UNSPECIFIED) |
|---|---|
| Subjects: | Q Science > QC Physics |
| Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) |
| Journal or Publication Title: | OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III |
| Publisher: | SPIE-INT SOC OPTICAL ENGINEERING |
| ISBN: | 0-8194-5014-6 |
| ISSN: | 0277-786X |
| Editor: | Osten, W and Creath, K and Kujawinska, M |
| Date: | 2003 |
| Volume: | 5144 |
| Number of Pages: | 16 |
| Page Range: | pp. 1-16 |
| Publication Status: | Published |
| Title of Event: | Conference on Optical Measurement Systems for Industrial Inspection III |
| Location of Event: | MUNICH, GERMANY |
| Date(s) of Event: | JUN 23-26, 2003 |
| URI: | http://wrap.warwick.ac.uk/id/eprint/9026 |
Data sourced from Thomson Reuters' Web of Knowledge
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