Dataset for: "Combining low-temperature gettering with phosphorus diffusion gettering for improved multicrystalline silicon" by Mohammad Al-Amin and John D. Murphy (School of Engineering, University of Warwick, Coventry, CV4 7AL, UK) Accepted for publication in IEEE Journal of Phovoltaics on 12th August 2017 DOI: 10.1109/JPHOTOV.2017.2741100 The dataset (a single file in XLSX format) contains the data behind all the graphs presented in the paper. Each worksheet within the spreadsheet relates to a single figure in the paper. Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk.