The Library
Si/SiC substrates for the implementation of linear-doped power LDMOS studied with device simulation
Tools
Chan, Chun Wa, Bonyadi, Yeganeh, Mawby, P. A. (Philip A.) and Gammon, P. M. (2016) Si/SiC substrates for the implementation of linear-doped power LDMOS studied with device simulation. Materials Science Forum, 858 . pp. 844-847. doi:10.4028/www.scientific.net/MSF.858.844 ISSN 1662-9752.
PDF
WRAP-Si-SiC-substrates-implementation-linear-doped-Chan-2016.pdf - Accepted Version Embargoed item. Restricted access to Repository staff only - Requires a PDF viewer. Download (405Kb) |
Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.8...
Abstract
In this study, a 600 V LDMOSFET using a silicon-on-silicon carbide (Si/SiC) substrate is presented. An SOI counterpart is established with a linear-doped drift region the same as that of the Si/SiC transistor. Simulation results show that they perform similar off-state behaviours, both with a significant tunneling leakage emerging above 450 V at 300 K. In the on-state, the proposed structure has advantages over the SOI, namely lower resistance, higher saturation current and improved self-heating effect. Turn-off performance is also enhanced owing to substantial reduction of the drain-substrate capacitance. These are realised by an βIOSβ (Insulator on Silicon) setup embedded in the Si/SiC structure.
Item Type: | Journal Article | ||||||
---|---|---|---|---|---|---|---|
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||
Journal or Publication Title: | Materials Science Forum | ||||||
Publisher: | Trans Tech Publications Ltd. | ||||||
ISSN: | 1662-9752 | ||||||
Official Date: | May 2016 | ||||||
Dates: |
|
||||||
Volume: | 858 | ||||||
Page Range: | pp. 844-847 | ||||||
DOI: | 10.4028/www.scientific.net/MSF.858.844 | ||||||
Status: | Peer Reviewed | ||||||
Publication Status: | Published | ||||||
Date of first compliant deposit: | 13 September 2017 | ||||||
Funder: | Royal Academy of Engineering (Great Britain) |
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |