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Design and simulations of SOI CMOS micro-hotplate gas sensors
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Udrea, F., Gardner, J. W., Setiadi, D., Covington, James A., Dogaru, T., Lu, C. C. and Milne, W. I. (2001) Design and simulations of SOI CMOS micro-hotplate gas sensors. Sensors and Actuators B: Chemical, 78 (1-3). pp. 180-190. doi:10.1016/S0925-4005(01)00810-3 ISSN 0925-4005.
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Official URL: http://dx.doi.org/10.1016/S0925-4005(01)00810-3
Abstract
This paper describes a new generation of integrated solid-state gas-sensors embedded in SOI micro-hotplates. The micro-hotplates lie on a SOI membrane and consist of MOSFET heaters that elevate the operating temperature, through self-heating, of a gas sensitive material. These sensors are fully compatible with SOI CMOS or BiCMOS technologies, offer ultra-low power consumption (under 100 mW), high sensitivity, low noise, low unit cost, reproducibility and reliability through the use of on-chip integration. In addition, the new integrated sensors offer a nearly uniform temperature distribution over the active area at its operating temperatures at up to about 300–350°C. This makes SOI-based gas-sensing devices particularly attractive for use in handheld battery-operated gas monitors.
This paper reports on the design of a chemo-resistive gas sensor and proposes for the first time an intelligent SOI membrane microcalorimeter using active micro-FET heaters and temperature sensors. A comprehensive set of numerical and analogue simulations is also presented including complex 2D and 3D electro-thermal numerical analyses.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Sensors and Actuators B: Chemical | ||||
| Publisher: | Elsevier Science SA | ||||
| ISSN: | 0925-4005 | ||||
| Official Date: | 30 August 2001 | ||||
| Dates: |
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| Volume: | 78 | ||||
| Number: | 1-3 | ||||
| Page Range: | pp. 180-190 | ||||
| DOI: | 10.1016/S0925-4005(01)00810-3 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
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