Radiated fields of capacitive micromachined ultrasonic transducers in air
UNSPECIFIED. (2003) Radiated fields of capacitive micromachined ultrasonic transducers in air. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 114 (3). pp. 1435-1449. ISSN 0001-4966Full text not available from this repository.
Official URL: http://dx.doi.org/10.1121/1.1604120
This paper presents a study of the radiated ultrasonic fields of capacitive micromachined ultrasonic transducers (often referred to as cMUTs) in air. These fields were modeled theoretically and then compared to the experimental near-field amplitude variations and directivity patterns of square cMUTs. The good agreement between theory and experiment indicates that the devices can be approximated to plane piston radiators. The fields of multiple elements driven in phase on the same silicon substrate are presented, where again comparison is made to theory. The results indicate that individual elements are unaffected by radiation through the silicon substrate from adjacent devices. It will also be demonstrated that it is possible to use the knowledge of these fields to develop air-coupled ultrasonic surface imaging systems. (C) 2003 Acoustical Society of America.
|Item Type:||Journal Article|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)|
|Journal or Publication Title:||JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA|
|Publisher:||ACOUSTICAL SOC AMER AMER INST PHYSICS|
|Number of Pages:||15|
|Page Range:||pp. 1435-1449|
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