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Stress-induced phase formation Of Pzt 52/48 thin films

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Zhang, Q., Cordova, S., Marshall, Jessica M., Shaw, C. P. and Whatmore, R. W. (2007) Stress-induced phase formation Of Pzt 52/48 thin films. Integrated Ferroelectrics, 88 (1). pp. 85-92. doi:10.1080/10584580601099017 ISSN 1058-4587.

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Official URL: http://dx.doi.org/10.1080/10584580601099017

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Abstract

In this work, tetragonal and rhombohedral phases in PZT 52/48 thin films were identified using XRD. The relative intensities of these phases were calculated. The presence of the rhombohedral phase may have implications for the piezoelectric properties, since the polar axis in rhombohedral crystals lies along the (111) body diagonal rather than the (001) axis for tetragonal crystals.

The effects of stress on phase co-existence at the morphotropic phase boundary were also investigated. Two PZT52/48 films were grown under the compressive stresses of different magnitudes. For the film grown under smaller compressive stress, two-phase co-existence was observed, but the film grown under larger compressive stress was observed to be rhombohedral dominant. The piezoelectric coefficient, d33,f of the rhombohedral dominant film was less than that of the mixed-phase film. It is possible that a (001)/(100) oriented film of slightly tetragonal composition (e.g. 48/52) could have higher piezoelectric coefficients than a mixed-phase MPB film.

Item Type: Journal Article
Divisions: Faculty of Science, Engineering and Medicine > Science > Physics
Journal or Publication Title: Integrated Ferroelectrics
Publisher: Taylor & Francis Inc.
ISSN: 1058-4587
Official Date: 2007
Dates:
DateEvent
2007Published
Volume: 88
Number: 1
Page Range: pp. 85-92
DOI: 10.1080/10584580601099017
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access

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