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Fabrication of waveguides by inductively coupled plasma etching on LiNbO 3 /LiTaO 3 single crystal film by liquid phase epitaxy growth
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Ren, Z., Yu, S., Marshall, Jessica M., Walker, David Stuart and Thomas, Pam A. (2007) Fabrication of waveguides by inductively coupled plasma etching on LiNbO 3 /LiTaO 3 single crystal film by liquid phase epitaxy growth. In: Asia-Pacific Optical Communications, Wuhan, China, 1-5 Nov 2007. Published in: Proceedings SPIE 6781, Passive Components and Fiber-based Devices IV, 6781 67812H. doi:10.1117/12.742842 ISSN 0277-786X.
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Official URL: http://dx.doi.org/10.1117/12.742842
Abstract
LiNbO3 films of 1-10μm thick were grown on z-cut LiTaO3 substrates using vanadium and boron based fluxes by liquid phase epitaxy (LPE) growth. Characterization of these films using scanning electron microscopy (SEM), electron backscattering diffraction and high-resolution X-ray diffraction (HRXRD) show that they are single-crystal and epitaxial with the substrate. Subsequently, LiNbO3 films were etched by SF6/Ar inductively coupled plasma (ICP) in order to fabricate straight ridge waveguides. Effects of parameters including working pressure, RIE power and ICP power are investigated and analyzed by measurement of etching depth, selectivity, etched surface state and sidewall profile by means of focused ion beam (FIB) etching, energy dispersive X-ray (EDX) analysis, SEM and surface profilometry. Optimized processes with high etching rates, good mask selectivity and near vertical profile have been achieved.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | Proceedings SPIE 6781, Passive Components and Fiber-based Devices IV | ||||
Publisher: | Society of Photo-Optical Instrumentation Engineers (SPIE) | ||||
ISSN: | 0277-786X | ||||
Book Title: | Passive Components and Fiber-based Devices IV | ||||
Official Date: | 2007 | ||||
Dates: |
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Volume: | 6781 | ||||
Page Range: | 67812H | ||||
DOI: | 10.1117/12.742842 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | Asia-Pacific Optical Communications | ||||
Type of Event: | Conference | ||||
Location of Event: | Wuhan, China | ||||
Date(s) of Event: | 1-5 Nov 2007 |
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