The Library
Reverse graded relaxed buffers for high Ge content SiGe virtual substrates
Tools
Shah, V. A., Dobbie, A., Myranov, Maksym, Fulgoni, D. J. F., Nash, Lee John and Leadley, D. R. (David R.) (2008) Reverse graded relaxed buffers for high Ge content SiGe virtual substrates. Applied Physics Letters, Vol.93 (No.19). p. 192103. doi:10.1063/1.3023068 ISSN 0003-6951.
|
PDF
WRAP_Shah_reverse_graded.pdf - Requires a PDF viewer. Download (247Kb) |
Official URL: http://dx.doi.org/10.1063/1.3023068
Abstract
An innovative approach is proposed for epitaxial growth of high Ge content, relaxed Si1−xGex buffer layers on a Si(001) substrate. The advantages of the technique are demonstrated by growing such structures via chemical vapor deposition and their characterization. Relaxed Ge is first grown on the substrate followed by the reverse grading approach to reach a final buffer composition of 0.78. The optimized buffer structure is only 2.8 µm thick and demonstrates a low surface threading dislocation density of 4×106 cm−2, with a surface roughness of 2.6 nm. The buffers demonstrate a relaxation of up to 107%.
Item Type: | Journal Article | ||||
---|---|---|---|---|---|
Subjects: | Q Science > QD Chemistry Q Science > QC Physics |
||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Thin films -- Research, Buffer solutions, Chemical vapor deposition, Dislocations in metals -- Research, Silicon compounds, Germanium compounds, Surfaces, Deformation of | ||||
Journal or Publication Title: | Applied Physics Letters | ||||
Publisher: | American Institute of Physics | ||||
ISSN: | 0003-6951 | ||||
Official Date: | 10 November 2008 | ||||
Dates: |
|
||||
Volume: | Vol.93 | ||||
Number: | No.19 | ||||
Page Range: | p. 192103 | ||||
DOI: | 10.1063/1.3023068 | ||||
Status: | Peer Reviewed | ||||
Access rights to Published version: | Open Access (Creative Commons) |
Data sourced from Thomson Reuters' Web of Knowledge
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |
Downloads
Downloads per month over past year