The Library
Design of a XYZ Scanner for home-made high-speed atomic force microscopy
Tools
Cai, Kunhai, He, Xianbin, Tian, Yanling, Liu, Xianping, Zhang, Dawei and Shirinzadeh, Bijan (2018) Design of a XYZ Scanner for home-made high-speed atomic force microscopy. Microsystem Technologies, 24 (7). pp. 3123-3132. doi:10.1007/s00542-017-3674-4 ISSN 0946-7076.
|
PDF
WRAP-design-XYZ-scanner-home-made-high-speed-Liu-2017.pdf - Accepted Version - Requires a PDF viewer. Download (2554Kb) | Preview |
Official URL: https://doi.org/10.1007/s00542-017-3674-4
Abstract
Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a simple and compact home-made high-speed AFM is set up and reported. As an important part of the scanning system, a parallel kinematic piezoelectric actuator (PZT) XYZ scanner is proposed, which can achieve high bandwidth and low coupling errors. Finite element analysis (FEA) is adopted to characterize the scanner, and verified the first two lateral resonance frequency of 5.6 kHz and the vertical resonance frequency is 29 kHz. In addition, some testing experiments are implemented, demonstrating feasibility of the proposed scanner. Finally, it was applied to the home-made AFM system, and some effective scanning imaging results can be obtained.
Item Type: | Journal Article | ||||||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TJ Mechanical engineering and machinery |
||||||||||||||||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||||||||||||||||
Library of Congress Subject Headings (LCSH): | Atomic force microscopy, Microscopy -- Technique, Biophysics | ||||||||||||||||||
Journal or Publication Title: | Microsystem Technologies | ||||||||||||||||||
Publisher: | ACM | ||||||||||||||||||
ISSN: | 0946-7076 | ||||||||||||||||||
Official Date: | July 2018 | ||||||||||||||||||
Dates: |
|
||||||||||||||||||
Volume: | 24 | ||||||||||||||||||
Number: | 7 | ||||||||||||||||||
Page Range: | pp. 3123-3132 | ||||||||||||||||||
DOI: | 10.1007/s00542-017-3674-4 | ||||||||||||||||||
Status: | Peer Reviewed | ||||||||||||||||||
Publication Status: | Published | ||||||||||||||||||
Access rights to Published version: | Restricted or Subscription Access | ||||||||||||||||||
Date of first compliant deposit: | 23 November 2017 | ||||||||||||||||||
Date of first compliant Open Access: | 26 February 2018 | ||||||||||||||||||
Funder: | Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC) | ||||||||||||||||||
RIOXX Funder/Project Grant: |
|
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |
Downloads
Downloads per month over past year