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Fabrication and characterizations of proton-exchanged LiNbO3 waveguides fabricated by inductively coupled plasma technique

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Ren, Z., Heard, P. J., Hallam, K. R., Wotherspoon, Alex, Jiang, Q., Varrazza, R. and Yu, Siyuan. (2006) Fabrication and characterizations of proton-exchanged LiNbO3 waveguides fabricated by inductively coupled plasma technique. Applied Physics Letters, Vol.88 (No.14). p. 142905. ISSN 0003-6951

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Official URL: http://dx.doi.org/10.1063/1.2191704

Abstract

This Letter reports the use of an inductively coupled plasma technique for fabrication of proton-exchanged (PE) LiNbO3 (LN) waveguides. Planar and stripe waveguides have been formed in Y-cut LN which are difficult to obtain with the conventional molten acid method due to the occurrence of surface damage. Secondary ion mass spectrometry, scanning electron microscopy, and infrared absorption spectrum characterization results revealed that a uniform vertical PE profile with a single low order crystal phase has been directly obtained as a result of this unique process. X-ray photoelectron spectroscopy characterization of the treated surface revealed the existence of NbO as the cause for a sometimes darkened surface and confirms the ability to completely restore the surface to LN by oxygen plasma treatment. Atomic force microscopy measurement confirms that good surface quality has been maintained after regeneration of the surface to LN.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics
Divisions:	Faculty of Science > Physics
Library of Congress Subject Headings (LCSH):	Ion exchange, Lithium compounds, Plasma waveguides, Secondary ion mass spectrometry, Scanning electron microscopy, Optical wave guides, X-ray photoelectron spectroscopy
Journal or Publication Title:	Applied Physics Letters
Publisher:	American Institute of Physics
ISSN:	0003-6951
Date:	7 April 2006
Volume:	Vol.88
Number:	No.14
Page Range:	p. 142905
Identification Number:	10.1063/1.2191704
Status:	Peer Reviewed
Access rights to Published version:	Open Access
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URI:	http://wrap.warwick.ac.uk/id/eprint/978