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Controlled oxide removal for the preparation of damage-free InAs(110) surfaces
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Veal, T. D. (Tim D.) and McConville, C. F. (Chris F.) (2000) Controlled oxide removal for the preparation of damage-free InAs(110) surfaces. Applied Physics Letters, Vol.77 (No.11). pp. 1665-1667. doi:10.1063/1.1310211 ISSN 0003-6951.
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Official URL: http://dx.doi.org/10.1063/1.1310211
Abstract
Controlled oxide removal from InAs(110) surfaces using atomic hydrogen (H*) has been achieved by monitoring the contaminant vibrational modes with high resolution electron energy loss spectroscopy (HREELS). The contributing oxide vibrational modes of the partially H* cleaned surface have been identified. Following hydrocarbon desorption during preliminary annealing at 360 °C, exposure to atomic hydrogen at 400 °C initially removes the arsenic oxides and indium suboxides; complete indium oxide removal requires significantly higher hydrogen doses. After a total molecular hydrogen dose of 120 kL, a clean, ordered surface, exhibiting a sharp (1×1) pattern, was confirmed by low energy electron diffraction and x-ray photoelectron spectroscopy. Energy dependent HREELS studies of the near-surface electronic structure indicate that no residual electronic damage or dopant passivation results from the cleaning process.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
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| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Library of Congress Subject Headings (LCSH): | Indium compounds, Oxidation, Electron energy loss spectroscopy, Low energy electron diffraction, X-ray photoelectron spectroscopy | ||||
| Journal or Publication Title: | Applied Physics Letters | ||||
| Publisher: | American Institute of Physics | ||||
| ISSN: | 0003-6951 | ||||
| Official Date: | 11 September 2000 | ||||
| Dates: |
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| Volume: | Vol.77 | ||||
| Number: | No.11 | ||||
| Page Range: | pp. 1665-1667 | ||||
| DOI: | 10.1063/1.1310211 | ||||
| Status: | Peer Reviewed | ||||
| Access rights to Published version: | Open Access (Creative Commons) | ||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC) |
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