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Surface and nanometrology, Markov and Fractal scale of size properties
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UNSPECIFIED (2002) Surface and nanometrology, Markov and Fractal scale of size properties. In: 7th International Symposium on Laser Metrology Applied to Science, Industry and Everyday Life, NOVOSIBIRSK, RUSSIA, SEP 09-13, 2002. Published in: SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2, 4900 (Part 1&2). pp. 691-707. ISBN 0-8194-4686-6. ISSN 0277-786X.
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Abstract
The paper explores the effect that a reduction in the scale of size has on performance, manufacture and metrology. It is shown that there are profound changes in which sometimes the meanings of operations and parameters diverge.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics | ||||
Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) | ||||
Journal or Publication Title: | SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2 | ||||
Publisher: | SPIE-INT SOC OPTICAL ENGINEERING | ||||
ISBN: | 0-8194-4686-6 | ||||
ISSN: | 0277-786X | ||||
Editor: | Chugui, YV and Bagayev, SN and Weckenmann, A and Osanna, PH | ||||
Official Date: | 2002 | ||||
Dates: |
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Volume: | 4900 | ||||
Number: | Part 1&2 | ||||
Number of Pages: | 17 | ||||
Page Range: | pp. 691-707 | ||||
Publication Status: | Published | ||||
Title of Event: | 7th International Symposium on Laser Metrology Applied to Science, Industry and Everyday Life | ||||
Location of Event: | NOVOSIBIRSK, RUSSIA | ||||
Date(s) of Event: | SEP 09-13, 2002 |
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