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Creating a low-cost, ultra-clean environment
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UNSPECIFIED (2002) Creating a low-cost, ultra-clean environment. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 26 (1). pp. 122-127. ISSN 0141-6359.
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Abstract
This paper describes a way to create a cleanroom environment with a limited budget, which may be useful to organizations requiring small amounts of very high quality surface processing. After a brief review of some general principles, it discusses the design, including practical constraints, and installation of a small facility in the University of Warwick. Based around standard bought-in items, it achieves cleanroom Class 10 000 (ISO Class 7) with local enclosures of better than Class 10 (ISO Class 4) air quality. (C) 2001 Elsevier Science Inc. All rights reserved.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TS Manufactures T Technology |
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Journal or Publication Title: | PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | ||||
Publisher: | ELSEVIER SCIENCE INC | ||||
ISSN: | 0141-6359 | ||||
Official Date: | January 2002 | ||||
Dates: |
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Volume: | 26 | ||||
Number: | 1 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 122-127 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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