The Library
Fabrication of microstructures by ion beam micromachining
Tools
UNSPECIFIED (1996) Fabrication of microstructures by ion beam micromachining. In: 2nd Annual SPIE Conference on Microlithography and Metrology in Micromachining, AUSTIN, TX, OCT 14-15, 1996. Published in: MICROLITHOGRAPHY AND METROLOGY IN MICROMACHINING II, 2880 pp. 248-255. ISBN 0-8194-2278-9.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Item Type: | Conference Item (UNSPECIFIED) | ||||
---|---|---|---|---|---|
Subjects: | Q Science > QC Physics | ||||
Series Name: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) | ||||
Journal or Publication Title: | MICROLITHOGRAPHY AND METROLOGY IN MICROMACHINING II | ||||
Publisher: | SPIE - INT SOC OPTICAL ENGINEERING | ||||
ISBN: | 0-8194-2278-9 | ||||
Editor: | Postek, MT and Friedrich, C | ||||
Official Date: | 1996 | ||||
Dates: |
|
||||
Volume: | 2880 | ||||
Number of Pages: | 8 | ||||
Page Range: | pp. 248-255 | ||||
Publication Status: | Published | ||||
Title of Event: | 2nd Annual SPIE Conference on Microlithography and Metrology in Micromachining | ||||
Location of Event: | AUSTIN, TX | ||||
Date(s) of Event: | OCT 14-15, 1996 |
Data sourced from Thomson Reuters' Web of Knowledge
Request changes or add full text files to a record
Repository staff actions (login required)
View Item |