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DESIGN OF AN ELEGANT AND INEXPENSIVE MULTIPLE-TARGET HOLDER AND LASER-BEAM SCANNER FOR USE IN LASER-ABLATION DEPOSITION OF THIN-FILMS
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UNSPECIFIED (1995) DESIGN OF AN ELEGANT AND INEXPENSIVE MULTIPLE-TARGET HOLDER AND LASER-BEAM SCANNER FOR USE IN LASER-ABLATION DEPOSITION OF THIN-FILMS. MEASUREMENT SCIENCE & TECHNOLOGY, 6 (1). pp. 128-130.
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Abstract
In thin film deposition by laser ablation it is often important to rotate the target and to raster the laser beam across the target during ablation to prevent excessive surface damage. A simple multiple-target holder, which allows individual target rotation and in vacuo target interchange, is presented. We also describe a method of rastering the laser beam.
Item Type: | Journal Item | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | MEASUREMENT SCIENCE & TECHNOLOGY | ||||
Publisher: | IOP PUBLISHING LTD | ||||
Official Date: | January 1995 | ||||
Dates: |
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Volume: | 6 | ||||
Number: | 1 | ||||
Number of Pages: | 3 | ||||
Page Range: | pp. 128-130 | ||||
Publication Status: | Published |
Data sourced from Thomson Reuters' Web of Knowledge
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