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INTEGRATED TIN OXIDE ODOR SENSORS
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UNSPECIFIED (1991) INTEGRATED TIN OXIDE ODOR SENSORS. SENSORS AND ACTUATORS B-CHEMICAL, 4 (1-2). pp. 117-121. ISSN 0925-4005.
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Abstract
This paper describes the design and fabrication of an integrated array of tin oxide odour sensors using planar micro-electronic silicon technology. Some fundamental properties of the device structure are discussed, including power consumption, along with its response to several odours. In addition, the sensing element is modelled as a pair of finite coplanar electrodes lying upon a thin oxide layer, and an analytical conductance equation obtained that relates its conductance to electrode geometry in a diffusion-limited model. The physical conditions that require the use of a diffusion or reaction model are discussed.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QD Chemistry | ||||
Journal or Publication Title: | SENSORS AND ACTUATORS B-CHEMICAL | ||||
Publisher: | ELSEVIER SCIENCE SA LAUSANNE | ||||
ISSN: | 0925-4005 | ||||
Official Date: | May 1991 | ||||
Dates: |
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Volume: | 4 | ||||
Number: | 1-2 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 117-121 | ||||
Publication Status: | Published |
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