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Ohmic contact resistance to GaN devices dependence with on temperature for GaN devices
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Pérez-Tomás, Amador, Fontserè, A., Placidi, Marcel, Baron, N., Chenot, Sébastien, Cordier, Yvon, Moreno, J.C., Gammon, P. M. and Jennings, M. R. (2011) Ohmic contact resistance to GaN devices dependence with on temperature for GaN devices. In: 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), Oslo, Norway, Aug 29 - Sep 2, 2010. Published in: Materials Science Forum, Vol. 679-680 pp. 816-819. doi:10.4028/www.scientific.net/MSF.679-680.816 ISSN 0255-5476.
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.6...
Abstract
The temperature dependence of Ohmic contacts to GaN devices is investigated in this paper via by measuring TLM contact resistances TLM vs Tas a function of temperature. measurements. In particular, the two types of Ohmic contacts are considered: (1) Contacts to highly doped implanted regions (such as the MOSFET drain/source contacts or the back contact of Schottky diodes) and (2) contacts to the 2 dimensional electron gas (2DEG) of an AlGaN/GaN heterojunction.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Materials Science Forum | ||||
Publisher: | Trans Tech Publications Ltd. | ||||
ISSN: | 0255-5476 | ||||
Official Date: | 2011 | ||||
Dates: |
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Volume: | Vol. 679-680 | ||||
Page Range: | pp. 816-819 | ||||
DOI: | 10.4028/www.scientific.net/MSF.679-680.816 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010) | ||||
Type of Event: | Conference | ||||
Location of Event: | Oslo, Norway | ||||
Date(s) of Event: | Aug 29 - Sep 2, 2010 |
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