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Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope
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UNSPECIFIED (2005) Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope. ACOUSTICS RESEARCH LETTERS ONLINE-ARLO, 6 (2). pp. 75-79. doi:10.1121/1.1851391 ISSN 1529-7853.
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Official URL: http://dx.doi.org/10.1121/1.1851391
Abstract
The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies. (C) 2005 Acoustical Society of America.
Item Type: | Journal Article | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Journal or Publication Title: | ACOUSTICS RESEARCH LETTERS ONLINE-ARLO | ||||
Publisher: | ACOUSTICAL SOC AMER AMER INST PHYSICS | ||||
ISSN: | 1529-7853 | ||||
Official Date: | April 2005 | ||||
Dates: |
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Volume: | 6 | ||||
Number: | 2 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 75-79 | ||||
DOI: | 10.1121/1.1851391 | ||||
Publication Status: | Published |
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