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Theoretical aspects of surface nanometrology
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UNSPECIFIED (2002) Theoretical aspects of surface nanometrology. In: 2nd International Symposium on Instrumentation Science and Technology (ISIST 2002), JINAN, PEOPLES R CHINA, AUG 18-22, 2002. Published in: PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1 pp. 1-15. ISBN 7-5603-1768-5.
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Abstract
Miniaturization has forced surface texture, form and size together making independent assessment difficult. This paper indicates the way that texture and form change character at the nano level and show how Markov and fractal mechanisms occur in manufacture. Some ways in which surface performance and measurement change with scale of size are also explored.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TL Motor vehicles. Aeronautics. Astronautics Q Science > QD Chemistry |
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Journal or Publication Title: | PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 1 | ||||
Publisher: | HARBIN INSTITUTE TECHNOLOGY PUBLISHERS | ||||
ISBN: | 7-5603-1768-5 | ||||
Editor: | Tan, JB and Wen, XF | ||||
Official Date: | 2002 | ||||
Dates: |
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Number of Pages: | 15 | ||||
Page Range: | pp. 1-15 | ||||
Publication Status: | Published | ||||
Title of Event: | 2nd International Symposium on Instrumentation Science and Technology (ISIST 2002) | ||||
Location of Event: | JINAN, PEOPLES R CHINA | ||||
Date(s) of Event: | AUG 18-22, 2002 |
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