Journal Article

Zhou, Leiqing, Colston, Gerard B., Myronov, Maksym, Leadley, D. R. (David R.), Trushkevych, Oksana, Shah, V. A. and Edwards, R. S. (Rachel S.) (2020) Ultrasonic inspection and self-healing of Ge and 3C-SiC semiconductor membranes. Journal of Microelectromechanical Systems, 29 (3). pp. 370-377. doi:10.1109/JMEMS.2020.2981909